JPH0430176B2 - - Google Patents

Info

Publication number
JPH0430176B2
JPH0430176B2 JP58025025A JP2502583A JPH0430176B2 JP H0430176 B2 JPH0430176 B2 JP H0430176B2 JP 58025025 A JP58025025 A JP 58025025A JP 2502583 A JP2502583 A JP 2502583A JP H0430176 B2 JPH0430176 B2 JP H0430176B2
Authority
JP
Japan
Prior art keywords
layer
polycrystalline silicon
silicon layer
oxygen
semiconductor device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP58025025A
Other languages
English (en)
Japanese (ja)
Other versions
JPS59149061A (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP58025025A priority Critical patent/JPS59149061A/ja
Publication of JPS59149061A publication Critical patent/JPS59149061A/ja
Publication of JPH0430176B2 publication Critical patent/JPH0430176B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D30/00—Field-effect transistors [FET]
    • H10D30/60—Insulated-gate field-effect transistors [IGFET]

Landscapes

  • Electrodes Of Semiconductors (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
  • Non-Volatile Memory (AREA)
JP58025025A 1983-02-15 1983-02-15 半導体装置の製造方法 Granted JPS59149061A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP58025025A JPS59149061A (ja) 1983-02-15 1983-02-15 半導体装置の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58025025A JPS59149061A (ja) 1983-02-15 1983-02-15 半導体装置の製造方法

Publications (2)

Publication Number Publication Date
JPS59149061A JPS59149061A (ja) 1984-08-25
JPH0430176B2 true JPH0430176B2 (en]) 1992-05-21

Family

ID=12154366

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58025025A Granted JPS59149061A (ja) 1983-02-15 1983-02-15 半導体装置の製造方法

Country Status (1)

Country Link
JP (1) JPS59149061A (en])

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0785493B2 (ja) * 1985-06-29 1995-09-13 ソニー株式会社 半導体装置

Also Published As

Publication number Publication date
JPS59149061A (ja) 1984-08-25

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